I have the big slide in truckmounts powered by blowers producing over 500cfm, I have cleaned area rugs on top of hardwood and shown the customer how the back is dry. Depending on your system and technique you should be fine. However if you have an area rug test out your system and see if the back is dry
Trigger control is important, letting off the water while you still move the wand will help to prevent overwetting the carpet.